Dual Beam 1 Helios 600Dual beam equipments assigned to nanolithography and lamellae preparation placed on concrete platforms inside the 125 m² 10000-class Clean Room of the INA. It consists of a 30 kV field-emission scanning electron column and a 30 kV Ga focused ion beam placed at 52° one each other. The ion column is able to work properly at low voltage (5 kV and lower), allowing the preparation of lamellae with low ion damage. Thus, this equipment has prepared in the last year about 40 lamellae, with high enough quality for atomic-resolution TEM imaging. In this equipment, there are five gas injectors as well, allowing the growth of nanodeposits with high resolution and the local etching of certain materials too. Besides, the equipment has electrical microprobes, EDX detection and STEM detection. With the help of Raith hardware and software, the equipment is also suited for electron beam lithography.
Helios 600 dual beam equipment installed inside the Clean Room of the INA building.
Dual Beam 2 Helios 650 This equipment is placed on concrete platforms inside the 125 m² 10000-class Clean Room of the INA. This model is an improved version of the Helios 600 one. Thus, the SEM column has resolution of 0.9 nm and it bears a monochromator and beam deceleration. The FIB column is differentially vacuum-pumped at the lowest part, allowing a well-defined beam profile to hit the sample surface. Preliminary results with such a column indicate that ultranarrow nanodeposits can be grown. This FIB column is nicely suited for lamellae preparation, in combination with the Omniprobe nanomanipulator. The equipment has got 5 gas injectors for nanodeposition and the local etching of certain materials too. Besides, the equipment has electrical microprobes, EDX detection and STEM detection.
Helios 650 equipment installed inside the Clean Room of the INA building
Dual Beam 3 Nova 200 with a cryo-transfer chamberThis dual beam equipment is used for life sciences. This equipment has worked properly for the last 4 years and in combination with the cryo-transfer set-up will be used to produce series of ion-cuts of cells embedded in resin or vitrified by means of liquid nitrogen. These images will be used to produce 3-dimensional reconstructions. Appropriate software for 3-dimensional compositional reconstructions based on energy-dispersive x-ray micro-analysis is also included in this equipment. If needed, the equipment also holds an Omniprobe nanomanipulator for lamellae preparation as well as 5 gas injectors for nanodeposition and the local etching of certain materials too. Besides, the equipment has STEM detection.
Nova 200 dual beam equipment and the cryo-transfer setup
Environmental SEM-FEG, model Quanta 250The environmental SEM, model Quanta 250, is installed in the same room as the Nova 200 dual beam. The FEG SEM column allows beam deceleration, which permits to keep resolution of 1.4 nm even at 1 kV electron landing voltage. The Quanta equipment can work under three different pressure ranges, the maximum pressure being 4000 Pa, thus close to ambient pressure. This allows observation of life-sciences samples without previous metallic coating. The equipment allows the use of a Wet-STEM, which permits to inspect samples with controlled humidity, this being crucial in life-science samples in order to maintain the same conditions as hold when functional. The equipment can also use a heater to perform observation on samples heated up to 1000 Celsius degrees.
Environmental SEM, Quanta FEG 250 equipment
SEM-FEG InspectThe Inspect model, is a general-purpose field-emission SEM for high-resolution imaging and composition analysis by energy-dispersive x-ray microanalysis.