[et_pb_section fb_built=”1″ _builder_version=”4.9.4″ _module_preset=”default” background_color=”#e4e4e4″ positioning=”none” custom_padding=”12px||6px|||” sticky_position=”top” border_width_bottom=”2px” border_color_bottom=”#f4f4f4″ box_shadow_style=”preset3″ global_colors_info=”{}”][et_pb_row column_structure=”1_3,1_3,1_3″ use_custom_gutter=”on” gutter_width=”1″ make_equal=”on” _builder_version=”4.9.4″ _module_preset=”default” max_width=”80%” custom_margin=”|auto|8px|auto||” custom_padding=”1px||0px|||” global_colors_info=”{}”][et_pb_column type=”1_3″ _builder_version=”4.9.4″ _module_preset=”default” border_color_all=”#FFFFFF” global_colors_info=”{}”][\/et_pb_column][et_pb_column type=”1_3″ _builder_version=”4.9.4″ _module_preset=”default” background_enable_color=”off” link_option_url=”http:\/\/sai.unizar.es\/solPrestSAI\/” link_option_url_new_window=”on” border_radii=”on|15px|15px|15px|15px” border_width_all=”2px” border_color_all=”#bababa” global_colors_info=”{}” background__hover_enabled=”on|hover” background_color__hover=”#FFFFFF” background_enable_color__hover=”on”][et_pb_text _builder_version=”4.14.2″ _module_preset=”default” text_font=”|||on|||||” text_text_color=”#333333″ text_font_size=”14px” link_text_color=”#333333″ background_enable_color=”off” custom_margin=”||4px|||” custom_padding=”|5px||5px|true|true” border_color_all=”RGBA(0,0,0,0)” border_color_right=”#FFFFFF” border_color_left=”#FFFFFF” global_colors_info=”{}” link_text_color__hover_enabled=”on|hover” link_text_color__hover=”#4370b4″]<\/p>\n
Access on demand<\/strong><\/a><\/p>\n [\/et_pb_text][\/et_pb_column][et_pb_column type=”1_3″ _builder_version=”4.9.4″ _module_preset=”default” border_color_all=”#FFFFFF” global_colors_info=”{}”][\/et_pb_column][\/et_pb_row][\/et_pb_section][et_pb_section fb_built=”1″ _builder_version=”4.9.4″ _module_preset=”default” custom_padding=”25px|||||” global_colors_info=”{}”][et_pb_row column_structure=”1_2,1_2″ _builder_version=”4.9.4″ _module_preset=”default” max_width=”75%” custom_padding=”||6px|||” global_colors_info=”{}”][et_pb_column type=”1_2″ _builder_version=”4.9.4″ _module_preset=”default” global_colors_info=”{}”][et_pb_text _builder_version=”4.9.4″ _module_preset=”default” text_font_size=”16px” text_line_height=”2em” ul_line_height=”2em” header_2_font=”|700|||||||” header_2_font_size=”23px” custom_margin=”||-8px|||” global_colors_info=”{}”]<\/p>\n The clean room is a laboratory that consists of several spaces areas with a temperature- controlled environment and with highly-demanding air filtering to limit the number of suspended particles and thus ensure a very high level of cleanliness. 25 m2 are classified as class 100 (ISO5) and 100 m2 as class 10,000 (ISO7). The class number indicates the quantity of particles per unit volume, in a laboratory without treatment this quantity is higher than 1,000,000.<\/p>\n The optical photolithography laboratory is located within class 100, and has instruments that allow defining structures with a lateral size of updown to 1 micrometer in photoresist on 4-inch wafers or smaller substrates. [\/et_pb_text][et_pb_text disabled_on=”on|on|on” _builder_version=”4.9.4″ _module_preset=”default” text_font=”|700||on|||||” text_text_color=”#FFFFFF” background_color=”#4370b4″ custom_padding=”15px||15px||true|false” link_option_url=”\/wp-content\/uploads\/2021\/09\/Nova_SPA.pdf” border_radii=”on|15px|15px|15px|15px” disabled=”on” global_colors_info=”{}”]<\/p>\n Download PDF<\/p>\n [\/et_pb_text][\/et_pb_column][et_pb_column type=”1_2″ _builder_version=”4.9.4″ _module_preset=”default” global_colors_info=”{}”][et_pb_image src=”https:\/\/lma.unizar.es\/wp-content\/uploads\/2021\/10\/salablanca-1.jpg” title_text=”salablanca-1″ _builder_version=”4.9.4″ _module_preset=”default” custom_margin=”||11px|||” border_radii=”on|15px|15px|15px|15px” global_colors_info=”{}”][\/et_pb_image][et_pb_text _builder_version=”4.9.4″ _module_preset=”default” text_font_size=”14px” global_colors_info=”{}”]<\/p>\n S\u00fcss Microtech MA6 mask aligner<\/em><\/p>\n [\/et_pb_text][\/et_pb_column][\/et_pb_row][et_pb_row _builder_version=”4.9.4″ _module_preset=”default” max_width=”75%” custom_margin=”4px|auto||auto||” custom_padding=”5px|||||” global_colors_info=”{}”][et_pb_column type=”4_4″ _builder_version=”4.9.4″ _module_preset=”default” global_colors_info=”{}”][et_pb_text _builder_version=”4.9.4″ _module_preset=”default” text_font_size=”16px” text_line_height=”2em” ul_line_height=”2em” header_2_font=”|700|||||||” header_2_font_size=”23px” global_colors_info=”{}”]Photolithography is complemented by other equipment that allows etching or the growth of materials according to the needs of the microfabrication process. For wet chemical etching, we have specialized chemical stations. Dry etching is carried out with a dual system from Sistec that allows us to etch by reactive ions (RIE) and by ion beam (IBE). For the growth of thin films, we use an electron beam evaporation equipment from Boc Edwards (PVD), a plasma-enhanced chemical vapour deposition (PECVD) equipment from Sistec and a micro-electrodeposition equipment. [\/et_pb_text][\/et_pb_column][\/et_pb_row][et_pb_row column_structure=”3_5,2_5″ _builder_version=”4.9.4″ _module_preset=”default” max_width=”75%” global_colors_info=”{}”][et_pb_column type=”3_5″ _builder_version=”4.9.4″ _module_preset=”default” global_colors_info=”{}”][et_pb_image src=”https:\/\/lma.unizar.es\/wp-content\/uploads\/2021\/10\/salablanca2.png” title_text=”salablanca2″ _builder_version=”4.9.4″ _module_preset=”default” width=”84%” custom_margin=”||10px|||” global_colors_info=”{}”][\/et_pb_image][et_pb_text _builder_version=”4.9.4″ _module_preset=”default” text_font_size=”14px” global_colors_info=”{}”]<\/p>\n Sistec RIE & IBE<\/em><\/p>\n [\/et_pb_text][\/et_pb_column][et_pb_column type=”2_5″ _builder_version=”4.9.4″ _module_preset=”default” global_colors_info=”{}”][et_pb_image src=”https:\/\/lma.unizar.es\/wp-content\/uploads\/2021\/10\/salablanca6.jpg” title_text=”salablanca6″ _builder_version=”4.9.4″ _module_preset=”default” width=”100%” min_height=”445px” custom_margin=”||10px||false|false” global_colors_info=”{}”][\/et_pb_image][et_pb_text _builder_version=”4.9.4″ _module_preset=”default” text_font_size=”14px” global_colors_info=”{}”]<\/p>\n Boc Edwards E-Beam PVD<\/em><\/p>\n [\/et_pb_text][\/et_pb_column][\/et_pb_row][et_pb_row _builder_version=”4.9.4″ _module_preset=”default” max_width=”75%” custom_margin=”4px|auto||auto||” custom_padding=”5px|||||” global_colors_info=”{}”][et_pb_column type=”4_4″ _builder_version=”4.9.4″ _module_preset=”default” global_colors_info=”{}”][et_pb_text _builder_version=”4.9.4″ _module_preset=”default” text_font_size=”16px” text_line_height=”2em” ul_line_height=”2em” header_2_font=”|700|||||||” header_2_font_size=”23px” global_colors_info=”{}”]In addition, we have a KLA-Tencor P6 mechanical profilometer to analyze surfaces, an oxygen plasma cleaning equipment, a probe station, a manual micro-welding equipment from Kulicke & Soffa, an anodic welding equipment and a precision saw for dicing chips. [\/et_pb_text][et_pb_image src=”https:\/\/lma.unizar.es\/wp-content\/uploads\/2021\/10\/salablanca5.jpg” title_text=”salablanca5″ align=”center” _builder_version=”4.9.4″ _module_preset=”default” custom_margin=”||12px|||” global_colors_info=”{}”][\/et_pb_image][et_pb_text _builder_version=”4.9.4″ _module_preset=”default” text_font_size=”14px” global_colors_info=”{}”]<\/p>\n Perfil\u00f3metro mec\u00e1nico KLA-Tencor P6<\/em><\/p>\n [\/et_pb_text][\/et_pb_column][\/et_pb_row][et_pb_row _builder_version=”4.9.4″ _module_preset=”default” max_width=”75%” custom_margin=”4px|auto||auto||” custom_padding=”5px|||||” global_colors_info=”{}”][et_pb_column type=”4_4″ _builder_version=”4.9.4″ _module_preset=”default” global_colors_info=”{}”][et_pb_text _builder_version=”4.9.4″ _module_preset=”default” text_font_size=”16px” text_line_height=”2em” ul_line_height=”2em” header_2_font=”|700|||||||” header_2_font_size=”23px” global_colors_info=”{}”]Researchers from public or private centers, as well as professionals from the industrial world who require the use of this equipment, will also have, if they so request, the scientific and technical support of our highly- qualified and experienced staff.[\/et_pb_text][\/et_pb_column][\/et_pb_row][et_pb_row column_structure=”1_2,1_2″ _builder_version=”4.9.4″ _module_preset=”default” max_width=”75%” custom_margin=”4px|auto||auto||” custom_padding=”5px|||||” global_colors_info=”{}”][et_pb_column type=”1_2″ _builder_version=”4.9.4″ _module_preset=”default” global_colors_info=”{}”][et_pb_image src=”https:\/\/lma.unizar.es\/wp-content\/uploads\/2021\/10\/salablanca4.jpg” title_text=”salablanca4″ align=”center” _builder_version=”4.9.4″ _module_preset=”default” custom_margin=”||12px|||” global_colors_info=”{}”][\/et_pb_image][et_pb_text _builder_version=”4.9.4″ _module_preset=”default” text_font_size=”14px” global_colors_info=”{}”]<\/p>\n 4\u201d wafer with microsystems fabricated in the clean room of the LMA.<\/em><\/p>\n [\/et_pb_text][\/et_pb_column][et_pb_column type=”1_2″ _builder_version=”4.9.4″ _module_preset=”default” global_colors_info=”{}”][et_pb_image src=”https:\/\/lma.unizar.es\/wp-content\/uploads\/2021\/10\/salablanca3.png” title_text=”salablanca3″ align=”center” _builder_version=”4.9.4″ _module_preset=”default” custom_margin=”||12px|||” global_colors_info=”{}”][\/et_pb_image][et_pb_text _builder_version=”4.9.4″ _module_preset=”default” text_font_size=”14px” global_colors_info=”{}”]<\/p>\n SEM image of the central area of one of these microsystems.<\/em><\/p>\n [\/et_pb_text][\/et_pb_column][\/et_pb_row][\/et_pb_section][et_pb_section fb_built=”1″ _builder_version=”4.9.4″ _module_preset=”default” min_height=”179px” custom_margin=”9px||-9px|||” custom_padding=”0px||4px|||” global_colors_info=”{}”][et_pb_row use_custom_gutter=”on” gutter_width=”4″ _builder_version=”4.9.4″ _module_preset=”default” max_width=”75%” custom_margin=”0px|auto||auto||” custom_padding=”55px||||false|false” global_colors_info=”{}”][et_pb_column type=”4_4″ _builder_version=”4.9.4″ _module_preset=”default” global_colors_info=”{}”][et_pb_gallery gallery_ids=”2911,2910,2909″ posts_number=”3″ show_title_and_caption=”off” show_pagination=”off” module_class=”ilogos” _builder_version=”4.9.4″ _module_preset=”default” global_colors_info=”{}”][\/et_pb_gallery][\/et_pb_column][\/et_pb_row][\/et_pb_section][et_pb_section fb_built=”1″ _builder_version=”4.9.4″ _module_preset=”default” use_background_color_gradient=”on” background_color_gradient_start=”#000000″ background_color_gradient_end=”rgba(0,0,0,0.48)” background_color_gradient_overlays_image=”on” background_image=”https:\/\/lma.unizar.es\/wp-content\/uploads\/2021\/10\/render-lma-1.jpg” custom_margin=”9px|||||” custom_padding=”||42px|||” saved_tabs=”all” global_colors_info=”{}”][et_pb_row column_structure=”1_3,1_3,1_3″ use_custom_gutter=”on” gutter_width=”2″ _builder_version=”4.9.4″ _module_preset=”default” max_width=”75%” global_colors_info=”{}”][et_pb_column type=”1_3″ _builder_version=”4.9.4″ _module_preset=”default” global_colors_info=”{}”][et_pb_text _builder_version=”4.9.4″ _module_preset=”default” text_text_color=”#FFFFFF” text_line_height=”2em” global_colors_info=”{}”]<\/p>\n Laboratorio de Microscop\u00edas Avanzadas\n<\/p>\n We are a unique initiative at national and international levels. We provide the scientific and industrial community with the most advanced infrastructures in Nanofabrication, Local Probe and Electron Microscopies for the observation, characterization, nanopatterning and handling of materials at atomic and molecular scale.[\/et_pb_text][\/et_pb_column][et_pb_column type=”1_3″ _builder_version=”4.9.4″ _module_preset=”default” global_colors_info=”{}”][et_pb_text _builder_version=”4.9.4″ _module_preset=”default” text_text_color=”#FFFFFF” link_text_color=”#FFFFFF” global_colors_info=”{}”]<\/p>\n Contact information<\/p>\n Campus R\u00edo Ebro, Edificio Edificio I+D+i<\/p>\n Tel.:(+34) 976 762 980 <\/strong><\/a><\/span>
Equipment<\/span><\/strong><\/p>\n\n
50018<\/span> Zaragoza (Espa\u00f1a)<\/span><\/span><\/div>\n
lma@unizar.es<\/strong><\/a><\/span>