Field Emission Scanning Electron Microscope CSEM-FEG INSPECT 50
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What kind of information can be obtained with this instrument?
Image / Analysis
By using the different SEM Detectors with which this instrument is equipped, the following information can be obtained:
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Images with secondary electrons image and topography by means of an ETD (Everhart-Thornley Detector).
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Image and composition by using a BSED (Back Scattering Electron Detector).
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Elemental chemical analysis by means of Energy-dispersive X-ray spectroscopy (EDX).
Sample requirements
Liquid and non-conductive samples observed need to be dried and metallized prior to observation. Samples studied at low vacuum can be used without metallization at low voltage (low contrast and low sharpness images).
Types of samples that can be studied with Inspect F-50 SEM include:
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Conductive and non-conductive samples, bulk, films, coatings, powders (compacted), etc.
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Samples compatible with high vacuum conditions.
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Sample Diameter from less than 1 mm up to 50 mm.
Technical Specifications
Inspect F 50 |
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SEM |
1 kV resolution |
3.0 nm without BD |
30kV resolution |
1.0 nm |
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Maximum beam current |
200 nA |
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Vacuum |
Modes |
High Vacuum |
X x Y x Z (mm) |
50 x 50 x 50 mm |
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Stage |
Tilt angles |
-15º to 75º |
Rotation |
360º |
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Detection |
Solid state BSE |
BSED |
ETD |
SE |