Environmental Scanning Electron Microscope: SEM-Quanta FEG-250, ESEM
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What kind of information can be obtained with this instrument?
Image / Analysis
By using the different SEM Detectors with which this instrument is equipped, the following information can be obtained:
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Image with secondary electrons-Topography: using an ETD/FLD (Everhart-Thornley Detector/ Large Field) detector for secondary electrons.
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Image (back scattered electrons) and composition by using GAD/vCD (Gaseous Analytical Detector/Low voltage High Contrast) detector.
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Images with secondary electrons from the gas phase by using a GSED/GAD (Gaseous Secondary Electron Detector/Gaseous Analytical) detector, for secondary electrons from the gas phase.
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Elemental chemical analysis by means of Energy-dispersive X-ray spectroscopy (EDX).
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STEM (scanning-transmission) Images by using a Scanning Transmission Electron Microscopy detector.
In situ experiments
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Heatting stage: annealing of the sample up to 1000 ºC with observation using a secondary electron detector.
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Peltier stage: changes in pressure, temperature and relative humidity of the chamber observing the sample using secondary electron or back-scattered electron detectors.
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Wet-STEM y STEM: Scanning Transmission Electron Microscopy in wet mode and also at high vacuum with dried samples.
Sample requirements
Liquid and non-conductive samples observed at high vacuum mode need to be dried and metallized prior to observation. Samples studied at low vacuum or ESEM modes do not require any previous preparation.
Types of samples that can be studied with SEM-Quanta FEG-250 include:
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Bulk materials, films, coatings, and compacted powders either conductive or non-conductive can be studied.
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Samples compatible with high vacuum, low vacuum and ESEM mode conditions.
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Wet samples.
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Sample can have a diameter from less than 1 mm up to 5 cm for high and low vacuum. ESEM (environmental SEM) observations require small samples (5 mm).
Technical Specifications
Quanta FEG 250 specifications |
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SEM |
1 kV |
3.0 nm without BD |
30 kV |
1.0 nm |
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3 kV (low vacuum) |
3.0 nm |
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Maximum beam current |
200 nA |
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Vacuum |
Modes |
High VacuumLow Vacuum (up to 200 Pa)ESEM (2600 Pa) |
Stage |
X x Y x Z (mm) |
50 x 50 x 50mm |
Detection |
Solid state BSE |
BSED, vCD, DBS |
STEM |
STEM |
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Low vacuum |
LFD, GAD |
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ESEM™ |
GSED, GBSD, ESEM-GAD |
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Imaging |
Scan strategies |
FEI Smartscan™, DCFI |
Cleanliness |
CryoCleanerEC, Integrated Plasma Cleaner |
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Navigation &large images |
MAPS, Nav-Cam |
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Chamber |
Large chamber, 10 ports |
Images